EE 426 - Semiconductor Devices

Lecture Hours: 2
Lab Hours: 2
Credit Hours: 3

Topics include: overview of microelectronics fabrication processes; photolithography techniques; oxidation theory, processing and characterization; diffusion theory, processing, and characterization; film deposition techniques; interconnections and contacts in integrated circuits; microelectronic packaging options; and MOS device process integration. The laboratory portion of the course will focus on clean room protocol, and the use of semiconductor processing equipment in the fabrication and characterization of resistors, diodes, and transistors on silicon wafers.